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About Us


Litho-Services provides a complete portfolio of engineering services for semiconductor manufacturing equipment and helps customers optimize their lithography equipment for extended use in their fabs or for the use in new and emerging applications. Litho-Services support scope includes pre-owned equipment, engineering services, field support and applications services as well as financial services.

We support steppers and scanners from ASML and Nikon as well as Canon and other manufacturers for wafer sizes of 200mm and below. Litho-Services also provides parts, parts and module repair, system refurbishment, equipment audits and de-installations, all at a very competitive cost.

Our engineering and applications services support long-term use and optimization of lithography equipment anywhere in the world. The combination of first-class support with a cost-efficient operation increases the lifetime value of equipment and production lines, providing exceptional customer value, all resulting in a better Cost of Ownership, positively impacting the bottom line.



NEW Parts List

Complete parts list now available.

Click here to view.

Contact Us

Parts: • Sales: • Service: • Phone: (480) 725-8661